Air flow sensor

(200L type)

D6FZ-FGT200

Air flow sensor

(500L type)

D6FZ-FGT500

Air flow sensor

(1000L type, cable length: 0.2 m)

D6FZ-FGS1000

Air flow station

(Cable length 1.5 m, including T-branch connector cable)

D6FZ-FGX21

Air flow sensor set (1000L type)

Air flow sensor (1000L type)

Air flow station

T-branch connector

Single-end wire cable (3 m)

D6FZ-FGS1000-S

T-branch connector

D6FZ-FC02

(Air flow sensor D6FZ-FGT only)

Mounting bracket

Mounting bracket: 1

Plus screw (M3): 4

D6FZ-FC03

(Air flow station D6FZ-FGX21 only)

Mounting magnet

Mounting magnet: 2

Plus screw (M3): 2

ZN9-EM01-S

Single-end wire cable

Cable length 3 m

M12 connector

(8 pin)

D6FZ-JD3A

Cable length 10 m

D6FZ-JD10A

Cable length 20 m

D6FZ-JD20A

Double-end connector cable

Cable length 3 m

M12 connector

(8 pin)

D6FZ-JD3B

Cable length 5 m

D6FZ-JD5B

Cable length 10 m

D6FZ-JD10B

Cable length 20 m

D6FZ-JD20B

Applicable fluid

Air, nitrogen (N2)

Working pressure

0.75 MPa (withstands pressure of 1.5MPa)

Measurement range

0 to 200 L/min

0 to 500 L/min

Accuracy

±2.0%F.S. at 50 L/min or more

±0.5%F.S. at less than 50 L/min

Pressure loss

2 kPa max.

4 kPa max.

Power supply voltage

12 to 24 VDC ±10% ripple (p-p) 10% max.

Current consumption

120 mA max.

Functions

Momentary flow/integrated flow/reversing display/zero point adjustment/peak and bottom hold/key lock/eco model/scaling (analog output)/judgement hysteresis/teaching

Output

Output interface

Analog

Current output 4 to 20 mA (1 contact), maximum load resistance 300 Ω max.

ON/OFF

Open collector output (2 outputs) 26.4 VDC 50 mA max.

ON residual voltage 2 V max.

(Outputs can be selected from judgement output, pulse output and unit error output)

RS-485

2-wire half duplex communication, start-stop synchronized method

Baud rate: 9.6k/19.2k/38.4k/115.2kbps, data bit length: 7/8bit,

stop bit length: 1/2bit, parity: none/even/odd,

termination resister (120 Ω ): ON/OFF,

communications protocol: compatible with CompoWay/F

Output values

Momentary flow, integrated flow, judgement output, unit error output

Connection bore diameter

Rc1/4 (8 A)

Rc1/2 (15 A)

Dimensions

30(W) × 77(D) × 63.7(H) mm

Weight (when packaged)

Approx. 400 g (500 g)

Applicable fluid

Air, nitrogen (N2)

Working pressure

0.99 MPa max.

Measurement

Flow

Detection range

1 to 1,000 L/min (std)

Resolution

0.1 L/min

Accuracy

±2.0% of reading at 50 L/min (std) or more

±0.1%F.S. at less than 50 L/min

Pressure

Detection range

0 to 0.99 MPa

Accuracy

±2%F.S.

Temperature

Detection range

-10 to 60°C

Accuracy

±1.5% (absolute temperature)

Pressure loss

Direct piping:10 kPa max. (0.5 MPa, at maximum flow)

Using coupler (TL type by NAGAHORI INDUSTRY CO., LTD.):

10 kPa max. (0.5 MPa, at maximum flow)

Power supply voltage

16 to 24 VDC ±10% ripple (p-p) 10% max. (Using single unit),

24 VDC ±10% ripple (p-p) 10% max. (Using multiple units)

Power consumption

2 W max.

Output

Output

interface

Analog

Current output 4 to 20 mA (2 contact)

Max. load resistance 270 Ω max.

ON/OFF

Open drain output (2 outputs)

24 VDC 50mA max.

ON residual voltage 1.5 V max., OFF leakage current 50 µA max.

RS-485

2-wire half duplex communication, start-stop synchronized method

Baud rate: 115.2 kbps (fixed), Data bit length: 8 bits (fixed), stop bit length: 1 bit (fixed), parity: even (fixed), communications protocol: compatible with CompoWay/F

Outpus values

Momentary standard flow, integrated standard flow, pressure, unit error output

Wiring connection

M12 connector (8-pin)

Connection bore diameter

Rc1 (25 A) bushing enables conversion to 15 A and 20 A

Dimensions

64(W) × 93(D) × 195(H) mm (excluding flange)

Weight (when packaged)

Approx. 1.2 kg (Approx. 1.7 kg)